Concepedia

Publication | Closed Access

Long lifecycle MEMS double-clamped beam based on low stress graphene compound film

DOI

10

Citations

28

References

2019

Year

Ting Zhang, Jingfu Bao, Rongzhou Zeng, Yang Yang, Leilei Bao, Feihong Bao, Yi Zhang, Feng Qin
Sensors and Actuators A Physical

References

YearCitations

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