Semi-supervised hotspot detection with self-paced multi-task learning

Abstract

Lithography simulation is computationally expensive for hotspot detection. Machine learning based hotspot detection is a promising technique to reduce the simulation overhead. However, most learning approaches rely on a large amount of training data to achieve good accuracy and generality. At the early stage of developing a new technology node, the amount of data with labeled hotspots or non-hotspots is very limited. In this paper, we propose a semi-supervised hotspot detection with self-paced multi-task learning paradigm, leveraging both data samples w./w.o. labels to improve model accuracy and generality. Experimental results demonstrate that our approach can achieve 2.9--4.5% better accuracy at the same false alarm levels than the state-of-the-art work using 10%-50% of training data. The source code and trained models are released on https://github.com/qwepi/SSL.