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Multi-layer concentric ring differential capacitance displacement sensor

Wei Fan, Mei Chen, Huaxue Jin, Yin Wang

Measurement · 2019 · 14 citations · 1 references

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Concepts

EngineeringElectrical EngineeringMechanical EngineeringMicroelectromechanical SystemsMicroelectronicsSensorsCapacitive SensingDisplacement MeasurementDisplacement SensorsElectrical SensorsMems SensorsMicroelectromechanical SensorsCapacitive Displacement SensingDifferential CapacitanceDifferential Capacitive Sensing

References

1

Dynamic responses of a precision positioning table impacted by a soft-mounted piezoelectric actuator

Yung-Tien Liu, Rong‐Fong Fung, Tai-Kun Huang · Precision Engineering · 2004 · 22 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +14