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A sacrificial-layer-free fabrication technology for MEMS transducer on flexible substrate

Materials ScienceEngineeringMicromachinesFlexible ElectronicsMicrofabricationMechanical EngineeringTransducer PrincipleBiomedical EngineeringMems TransducerFlexible SensorMicroelectronicsMicro-electromechanical SystemMicromachined Ultrasonic Transducer