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Gradients of microstructure, stresses and mechanical properties in a multi-layered diamond thin film revealed by correlative cross-sectional nano-analytics

Materials ScienceDiamond-like CarbonEngineeringMechanical PropertiesNanomaterialsNanotechnologyMechanical EngineeringApplied PhysicsNanoscale ModelingNanometrologyThin FilmsNanoscale ScienceCorrelative Cross-sectional Nano-analyticsNanomechanics