Design and Fabrication of a Piezoelectric Micromachined Ultrasonic Transducer Array Based on Ceramic PZT

Abstract

This paper presents a piezoelectric micromachined ultrasonic transducer (pMUT) array fabricated using high-piezoelectric-coefficient ceramic PZT wafers. A new process for polishing ceramic PZT layers down to 5 μm has been developed and applied for manufacturing high-sensitivity pMUTs. A 2 MHz working pMUT array (8 × 8 elements) based on ceramic PZT has been designed, modeled, fabricated and characterized.