Publication | Closed Access
Reliability of electrostatically actuated MEMS resonators to random mass disturbance
18
Citations
46
References
2018
Year
Electrical EngineeringEngineeringMems ResonatorsMicrofabricationMechanical EngineeringMechanical SystemsNano Electro Mechanical SystemMicroelectromechanical SystemsActuationMicroactuatorMicroelectronicsMicro-electromechanical System
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