Concepedia

Publication | Closed Access

Research on temperature characteristic of parasitic capacitance in MEMS capacitive accelerometer

DOI

33

Citations

11

References

2018

Year

Xianshan Dong, Qinwen Huang, Wei Xu, Bin Tang, Shaohua Yang, Junhua Zhu, Yunfei En
Sensors and Actuators A Physical

References

YearCitations

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