Publication | Closed Access
Highly preferred orientation of Ga2O3 films sputtered on SiC substrates for deep UV photodetector application
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Citations
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References
2018
Year
Materials ScienceMaterials EngineeringElectrical EngineeringEngineeringPreferred OrientationApplied PhysicsGallium OxideSic SubstratesThin Film Process TechnologyThin FilmsMolecular Beam EpitaxyOptoelectronicsChemical Vapor DepositionThin Film ProcessingGa2o3 Films
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