Publication | Closed Access
Numerical investigation of wafer drying induced by the thermal Marangoni effect
21
Citations
40
References
2018
Year
Wafer DryingHeat Transfer ProcessEngineeringDesiccationThermal Marangoni EffectMechanical EngineeringApplied PhysicsThermal AnalysisThermal ProcessingThermal ModelingThermodynamicsHeat TransferThermal EngineeringNumerical Investigation
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