Publication | Closed Access
Energy-enhanced deposition of copper thin films by bipolar high power impulse magnetron sputtering
73
Citations
22
References
2018
Year
Materials ScienceMaterials EngineeringEnergy-enhanced DepositionEngineeringSurface ScienceApplied PhysicsThin FilmsPulsed Laser DepositionMicroelectronicsChemical DepositionChemical Vapor DepositionCopper Thin FilmsThin Film Processing
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