Energy-enhanced deposition of copper thin films by bipolar high power impulse magnetron sputtering

Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology

W. C. Oliver, George M. Pharr · Journal of materials research/Pratt's guide to venture capital sources · 2004 · 7.8K citations

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Microstructural evolution during film growth

I. Petrov, P.B. Barna, Lars Hultman et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 1.7K citations

Natural Sciences, Materials Engineering, Materials Science +17

On the film density using high power impulse magnetron sputtering

Mattias Samuelsson, Daniel Lundin, J. Jensen et al. · Surface and Coatings Technology · 2010 · 416 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +11

Target material pathways model for high power pulsed magnetron sputtering

D.J. Christie · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 290 citations

Natural Sciences, Materials Engineering, Materials Science +14

Influence of pulse duration on the plasma characteristics in high-power pulsed magnetron discharges

Stéphanos Konstantinidis, J. P. Dauchot, M. Ganciu et al. · Journal of Applied Physics · 2006 · 163 citations · Full text

Natural Sciences, Materials Science, Physics +14