Publication | Closed Access
A highly sensitive and flexible capacitive pressure sensor based on a micro-arrayed polydimethylsiloxane dielectric layer
205
Citations
34
References
2018
Year
EngineeringFlexible Pressure SensorFlexible SensorsFlexible ElectronicsMicrofabricationHigh SensitivityMechanical EngineeringImplantable SensorTypical Sandwich StructureNano Electro Mechanical SystemSensor DesignBiomedical EngineeringFlexible SensorMicrofluidicsSensor TechnologyMicro-electromechanical System
A flexible pressure sensor with high sensitivity has been proposed which consists of a typical sandwich structure by integrating a PDMS substrate with a micro-arrayed PDMS dielectric layer.
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