Publication | Closed Access
Effect of porous silicon substrate on structural, mechanical and optical properties of MOCVD and ALD ruthenium oxide nanolayers
17
Citations
34
References
2018
Year
Materials EngineeringMaterials ScienceEngineeringNanomaterialsNanotechnologyOptical PropertiesSurface ScienceApplied PhysicsOxide ElectronicsChemical Vapor DepositionPorous Silicon SubstrateThin Film Processing
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