Korean Journal of Chemical Engineering · 2018 · 15 citations · 22 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsAtomic Layer DepositionMetal OxidesMetalsSurface PhysicsThin-film DepositionThin-film MaterialsAtomic Layer Deposition PrecursorsOxide Film FormationPlasma-enhanced Atomic Layer DepositionThin Oxide Films
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