Journal of Nanoscience and Nanotechnology · 2018 · 35 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsOptical MaterialsThin FilmsOptoelectronic MaterialsThin Film AnnealingThin Film Electrical PropertiesThin Film Optical PropertiesThin-film MaterialsTransparent Conducting OxidesElectrical PropertiesElectrical ResistivityIndium Tin Oxide Thin FilmsMagnetron SputteringOptical TransmittanceOxygen VacanciesThermal AnnealingTransparent Conducting Films
Ωcm, while those annealed in air or oxygen ambient produced poorer electrical properties despite their good optical transmittance owing to the presence of oxygen. The high quality of the ITO film annealed in nitrogen could be attributed to the combined effects of effective suppression of oxygen incorporation into films (thus maintaining oxygen vacancies in the ITO film), enhanced Sn doping, and improved the crystallinity with larger grain size.