Publication | Closed Access
Chemical, optical, and electrical characterization of Ga2O3 thin films grown by plasma-enhanced atomic layer deposition
82
Citations
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References
2018
Year
Materials ScienceChemical EngineeringOptical MaterialsEngineeringGa2o3 Thin FilmsSurface ScienceApplied PhysicsElectrical CharacterizationGallium OxideThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing
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