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Preparation of Si-SiOx nanoparticles from volatile residue produced by refining of silicon

Materials ScienceMolecular SieveChemical EngineeringEngineeringMicrofabricationNanotechnologyNanomaterialsSi-siox NanoparticlesSiliceneSemiconductor Device FabricationVolatile ResidueChemistrySilicon On Insulator