Fabrication of SiC/Si, SiC/SiO2, and SiC/glass heterostructures via VUV/O3 activated direct bonding at low temperature

Jikai Xu, Chenxi Wang, Daoyuan Li, J.P. Cheng, Yi‐Ping Wang, Chunjin Hang, Yanhong Tian

Ceramics International · 2018 · 45 citations · 22 references

Concepts

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