Structure and electrical properties of boron doped hydrogenated mixed-phase silicon films for uncooled microbolometer - Concepedia

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Structure and electrical properties of boron doped hydrogenated mixed-phase silicon films for uncooled microbolometer

20

Citations

31

References

2018

Year

Chonghoon Shin, Duy Phong Pham, Jinjoo Park, Sangho Kim, Youn-Jung Lee, Junsin Yi

Infrared Physics & Technology

Electrical EngineeringEngineeringMixed-phase Silicon FilmsMicrofabricationSurface ScienceApplied PhysicsUncooled MicrobolometerInstrumentationSilicon On InsulatorMicroelectronicsElectrical Properties

References

	Year	Citations

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