Processing of dielectric materials and metals with PS laserpulses

Abstract

Ever since industrially applicable ps laser systems have been available, cold ablation with ultra short laser pulses is of huge interest when high requirements concerning accuracy, defined surface roughness and small heat affected zone are demanded. Interesting applications are in the fields of surface and 3-d structuring with direct and induced processes. For a profitable industrial use of this technology high process efficiency is required, which is enabled by the development of systems with high average power of more than 100 W. The process efficiency directly scales with the average power when the repetition rate of the system is properly chosen. But aside from process efficiency often a high surface quality (low surface roughness, minimized surface melting and no oxidation processes) is desired. These measures are not only strongly affected by the laser parameters but also by the strategy of structuring. Especially for surface structuring the corresponding requirements for the equipment of the beam guiding system are often not accomplishable and therefore there is a strong demand for new technologies which have to be developed.