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Controlled buckling and postbuckling behaviors of thin film devices suspended on an elastomeric substrate with trapezoidal surface relief structures

EngineeringSoft RoboticsFlexible ElectronicsMicrofabricationMechanicsElastomeric SubstrateMechanical EngineeringApplied PhysicsOrigami MetamaterialsFoldable StructureThin Film DevicesElectronic PackagingFlexible SensorMicroelectronicsThin-walled StructureMicro-electromechanical System