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Molecular dynamics and experimental study on comparison between static and dynamic ploughing lithography of single crystal copper

Materials ScienceEngineeringElectron-beam LithographyBeam LithographyMicrofabricationApplied PhysicsMetallographyNanoscale ModelingMolecular DynamicsSingle Crystal CopperMicrostructureNanolithography MethodDynamic Ploughing Lithography