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Growth assessment and scrutinize dielectric reliability of c-axis oriented insulating AlN thin films in MIM structures for microelectronics applications

Materials ScienceDielectric ReliabilityAluminium NitrideEpitaxial GrowthEngineeringGrowth AssessmentThin Film ProcessingApplied PhysicsThin FilmsElectronic PackagingMicroelectronicsMolecular Beam EpitaxyAln Thin FilmsMicrostructureElectrical Insulation