Growth assessment and scrutinize dielectric reliability of c-axis oriented insulating AlN thin films in MIM structures for microelectronics applications

Shuvam Pawar, Kirandeep Singh, Shubham Sharma, Akhilesh Pandey, Shankar Dutta, Davinder Kaur

Materials Chemistry and Physics · 2018 · 37 citations · 37 references

Concepts

References

37