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Statistical Modeling and Surface Texture Study of Polished Silicon Wafer Si (100) using Chemically Assisted Double Disk Magnetic Abrasive Finishing

Materials ScienceMaterials EngineeringEngineeringMicrofabricationSurface ScienceApplied PhysicsSurface Texture StudySurface FinishingAbrasive ProcessSurface FinishSurface PolishingStatistical ModelingSurface ProcessingAbrasive MachiningMicrostructureMicroelectronics