Publication | Open Access

A novel ductile machining model of single-crystal silicon for freeform surfaces with large azimuthal height variation by ultra-precision fly cutting

EngineeringSingle-crystal SiliconMicrofabricationMaterial MachiningMechanical EngineeringApplied PhysicsNovel DuctileFabrication TechniqueMachine ToolSolid MechanicsUltra-precision Fly CuttingMicroelectronics3D PrintingMicrostructure