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Structural, optoelectronic and mechanical properties of PECVD Si-C-N films: An effect of substrate bias

Materials ScienceOptical MaterialsEngineeringMechanical PropertiesSubstrate BiasApplied PhysicsSemiconductor Device FabricationPecvd Si-c-n FilmsThin FilmsEpitaxial GrowthOptoelectronicsChemical Vapor DepositionThin Film Processing