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Depth profile analyses with sub 100-nm depth resolution of a metal thin film by femtosecond - laser ablation - inductively coupled plasma - time-of-flight mass spectrometry

PhysicsMicroscopyNatural SciencesSpectroscopyLaser-induced BreakdownMass SpectrometryApplied PhysicsLaser AblationMicroanalysisDepth Profile AnalysesMetal Thin FilmMedicineSpectrochemical Analysis