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Analytical modeling and simulation of MEMS piezoresistive pressure sensors with a square silicon carbide diaphragm as the primary sensing element under different loading conditions

Electrical EngineeringDifferent Loading ConditionsEngineeringSensorsMicrofabricationMechanical EngineeringMechatronicsMechanical SystemsPiezoelectricitySensor DesignAnalytical ModelingInstrumentationPrimary Sensing ElementSensor TechnologyMicro-electromechanical SystemMicromachined Ultrasonic Transducer