Concepedia

Diamond-like amorphous carbon layer film by an inductively coupled plasma system for next generation etching hard mask

Se Jun Park, Dohyung Kim, Seungmoo Lee, Y.K. Ha, Mingyoo Lim, Kangsoo Kim

Thin Solid Films · 2018 · 37 citations · 11 references

DOI

Concepts

References

11

Diamond-like amorphous carbon

John Robertson · Materials Science and Engineering R Reports · 2002 · 6.1K citations

Raman ‘‘fingerprinting’’ of amorphous carbon films

M. A. Tamor, W. C. Vassell · Journal of Applied Physics · 1994 · 960 citations

, , +14

Diamond-like carbon

John Robertson · Pure and Applied Chemistry · 1994 · 242 citations · Full text

, , +7

Predictions of ion energy distributions and radical fluxes in radio frequency biased inductively coupled plasma etching reactors

Robert J. Hoekstra, Mark J. Kushner · Journal of Applied Physics · 1996 · 96 citations

, , +14

Advanced plasma technology in microelectronics

C. O. Jung, Byeonghun Hwang, Joo Tae Moon et al. · Thin Solid Films · 1999 · 49 citations

, , +12