Publication | Closed Access
Phosphorus diffused LPCVD polysilicon passivated contacts with in-situ low pressure oxidation
40
Citations
25
References
2018
Year
Materials ScienceElectrical EngineeringEngineeringMicrofabricationSurface ScienceApplied PhysicsSemiconductor Device FabricationElectronic PackagingLpcvd PolysiliconSilicon On Insulator
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