Single point diamond turning of silicon for flat X-rays mirrors

Abstract

Silicon Mirrors are essential components for guiding the X-Ray beam and focusing it to a particular location. Due to lower X-ray wavelength, these mirrors require super smooth surface finish to avoid the strong scattering from surface. Single Point Diamond Turning is used to examine the fabrication possibility of X-Ray mirror. A number of machining cuts are performed with parameters like tool feed rate, Spindle Speed and depth of cut. The surface is characterized by mechanical profiler, optical profiler, Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM). The optimized surface roughness achieved is 0.873 nm. Copyright © 2017 VBRI Press.