Publication | Open Access
Silicon pore optics mirror module production and testing
19
Citations
19
References
2018
Year
Optical MaterialsEngineeringX-ray SpectroscopyMicroscopyMicro-optical ComponentSilicon On InsulatorX-ray FluorescenceX-ray ImagingElectronic PackagingInstrumentationGraded-reflectivity MirrorsPhysicsX-ray OpticsOptics ModulesSemiconductor Device FabricationSynchrotron RadiationMicroelectronicsX-ray Free-electron LaserSilicon Pore OpticsMicrofabricationX-ray DiffractionApplied PhysicsOptoelectronicsX-ray Optic
Silicon Pore Optics (SPO) has been established as a new type of x-ray optics that enables future x-ray observatories such as Athena. SPO is being developed at cosine with the European Space Agency (ESA) and academic and industrial partners. The optics modules are lightweight, yet stiff, high-resolution x-ray optics, that shall allow missions to reach an unprecedentedly large effective area of several square meters, operating in the 0.2 - 12 keV band with an angular resolution better than 5 arc seconds. In this paper we are going to discuss the latest generation production facilities and we are going to present results of the production of mirror modules for a focal length of 12 m, including x-ray test results.
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