Publication | Closed Access
Effect of growth temperature on AlN thin films fabricated by atomic layer deposition
42
Citations
32
References
2018
Year
Materials ScienceAluminium NitrideGrowth TemperatureEngineeringSurface ScienceApplied PhysicsThin FilmsAtomic Layer DepositionChemical DepositionChemical Vapor DepositionAln Thin FilmsThin Film Processing
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