High-quality tailored-edge cleaving using aberration-corrected Bessel-like beams

Abstract

We report on the usage of ultrashort laser pulses in the form of aberration-corrected Bessel-like beams for laser cutting of glass with bevels. Our approach foresees inclining the material's entrance surface with respect to the processing optics. The detailed analysis of phase distortions caused by the beam transition through the tilted glass surface allows precompensating for occurring aberrations using digital holography. We verify theoretical considerations by means of pump-probe microscopy and present high-quality edges in nonstrengthened silicate glass.