Fabrication and testing of metal/polymer microstructure heat exchangers based on micro embossed molding method

Imprint of sub-25 nm vias and trenches in polymers

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Applied Physics Letters · 1995 · 2.7K citations

Engineering, Manufacturing Engineering, Materials Science +15

Hot embossing as a method for the fabrication of polymer high aspect ratio structures

Holger Becker, Ulf Heim · Sensors and Actuators A Physical · 2000 · 664 citations

Engineering, Manufacturing Engineering, Materials Science +10

Microlens array produced using hot embossing process

N.S. Ong, Young-Seo Koh, Yongqing Fu · Microelectronic Engineering · 2002 · 175 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +10

Polymer embossing tools for rapid prototyping of plastic microfluidic devices

Jagannathan Narasimhan, Ian Papautsky · Journal of Micromechanics and Microengineering · 2003 · 153 citations · Full text

Engineering, Bioengineering, Biomedical Engineering +17

Injection molding of microstructured components from plastics, metals and ceramics

R. Ruprecht, Thomas Gietzelt, K. Müller et al. · Microsystem Technologies · 2002 · 142 citations

Engineering, Materials Engineering, Materials Science +14