Concepedia

Publication | Open Access

Highly sensitive 3C-SiC on glass based thermal flow sensor realized using MEMS technology

DOIFull Paper Access

50

Citations

41

References

2018

Year

V.R. Balakrishnan, Toan Dinh, Hoang‐Phuong Phan, Dzung Viet Dao, Nam‐Trung Nguyen
Sensors and Actuators A Physical

References

YearCitations

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