Post-deposition annealing of thin RF magnetron sputter-deposited VO2 films above the melting point

Sergey S. Maklakov, Victor I. Polozov, Alexey D. Mishin, Ilya A. Ryzhikov, Alexander L. Trigub, V. A. Amelichev, V. N. Kisel

Journal of Alloys and Compounds · 2018 · 30 citations · 70 references

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