Moisture barrier and bending properties of silicon nitride films prepared by roll-to-roll plasma enhanced chemical vapor deposition - Concepedia

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Moisture barrier and bending properties of silicon nitride films prepared by roll-to-roll plasma enhanced chemical vapor deposition

34

Citations

39

References

2018

Year

Tae‐Yeon Cho, Won-Jae Lee, Sang‐Jin Lee, Jae-Heung Lee, Juwhan Ryu, Seong-Keun Cho, Sung‐Hoon Choa

Thin Solid Films

Materials ScienceMoisture BarrierEngineeringSurface ScienceApplied PhysicsElectronic PackagingChemical Vapor DepositionPlasma EtchingPlasma ProcessingThin Film ProcessingSilicon Nitride Films

References

	Year	Citations

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