Moisture barrier and bending properties of silicon nitride films prepared by roll-to-roll plasma enhanced chemical vapor deposition

Tae‐Yeon Cho, Won-Jae Lee, Sang‐Jin Lee, Jae-Heung Lee, Juwhan Ryu, Seong-Keun Cho, Sung‐Hoon Choa

Thin Solid Films · 2018 · 35 citations · 39 references

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