Thermal Studies of Nanoporous Si Films with Pitches on the Order of 100 nm —Comparison between Different Pore-Drilling Techniques

Qing Hao, Dongchao Xu, Hongbo Zhao, Yue Xiao, Fabian Javier Medina

Scientific Reports · 2018 · 27 citations · 46 references

DOIFull text

Open access

References

46