Concepedia

Control of residual stress of tetrahedral amorphous carbon thin film deposited on dielectric material by filtered cathodic vacuum arc source by using mid-frequency pulse bias voltage

Jung-Hwan In, Young‐Bok Kim, Yeon Hwang, Ju Hyeon Choi

Surface and Coatings Technology · 2018 · 23 citations · 22 references

DOI

Concepts

References

22

Diamond-like amorphous carbon

John Robertson · Materials Science and Engineering R Reports · 2002 · 6.1K citations

Stress reduction and bond stability during thermal annealing of tetrahedral amorphous carbon

Andrea C. Ferrari, B. Kleinsorge, N. A. Morrison et al. · Journal of Applied Physics · 1999 · 431 citations

, , +17

Preparation and properties of highly tetrahedral hydrogenated amorphous carbon

M. Weiler, S. Sattel, Tobias W. Giessen et al. · Physical review. B, Condensed matter · 1996 · 370 citations

, , +16

Influence of ion energy and substrate temperature on the optical and electronic properties of tetrahedral amorphous carbon (<i>ta</i>-C) films

Manish Chhowalla, John Robertson, C. W. Chen et al. · Journal of Applied Physics · 1997 · 363 citations

, , +17

A perspective on the optimisation of hard carbon and related coatings for engineering applications

Stéphane Neuville, A. Matthews · Thin Solid Films · 2007 · 341 citations

, , +16