Journal of Physics Conference Series · 2018 · 17 citations · 15 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistryOptical MaterialsThin FilmsCoatingsGlass MaterialsOptical Thin FilmsThin Film Optical PropertiesThin-film DepositionThin-film MaterialsAnti-reflection CoatingsAntireflection CoatingsOptical CoatingsOptical PropertiesSol-gel CoatingsSol-gel MaterialsSol-gel SystemsSurface Optical Properties
In this present work sol-gel technique with spin coating method is used to deposit Titanium dioxide thin films on glass substrates as anti-reflection coating (ARC) films.Nano crystalline TiO 2 (anatase phase) is obtained after heating at 550°C for 2 h.The optical properties of TiO 2 films were studied by UV-Vis absorption/reflection spectroscopy, the average transmittance of monolayer coated on glass substrates was greater than 95% in the wavelength range of 300-1000 nm. Keywords. Sol-
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Semiconductor physics and devices
Materials Today · 2006 · 798 citations · Full text
Introduction to microelectronic fabrication
G.W.A.D. · Microelectronics Reliability · 1988 · 232 citations