Publication | Closed Access
Design, development and characterization of MEMS silicon diaphragm force sensor
47
Citations
17
References
2018
Year
EngineeringMicrofabricationMechanical EngineeringMechanical SystemsNano Electro Mechanical SystemMicroelectromechanical SystemsDiaphragm Force SensorMicroactuatorInstrumentationMicro-electromechanical System
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