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Integrated Fabrication of High-Temperature Microelectromechanical System Sensor on Aeroengine Turbine Blade

Energy HarvestingEngineeringMicromachinesSensorsMicrofabricationMechanical EngineeringMicroelectromechanical SystemsAeroengine Turbine BladeInstrumentationThermal SensorMicroelectronicsSensor TechnologyMicro-electromechanical System