Publication | Closed Access
Electrical and thermal properties of Cu-Ta films prepared by magnetron sputtering
14
Citations
21
References
2018
Year
Materials EngineeringMaterials ScienceElectrical EngineeringEngineeringNanoelectronicsApplied PhysicsMagnetron SputteringSemiconductor MaterialCu-ta FilmsThin FilmsChemical DepositionMicroelectronicsChemical Vapor DepositionThin Film ProcessingThermal Properties
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