Concepedia

Publication | Open Access

Exploiting atomic layer deposition for fabricating sub-10 nm X-ray lenses

DOIFull Paper Access

42

Citations

19

References

2018

Year

Benedikt Rösner, Frieder Koch, Florian Döring, J. Bosgra, Vitaliy A. Guzenko, Eugenie Kirk, Markus R. Meyer, Joshua Loroña Ornelas, R. Fink, Stefan Stanescu,
Microelectronic Engineering

References

YearCitations

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