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Surface damage of single-crystal diamond (100) processed based on a sol-gel polishing tool

Materials ScienceDiamond-like CarbonEngineeringMaterial ProcessingCorrosionSol-gel Polishing ToolMechanical EngineeringSurface ScienceSingle-crystal DiamondSurface DamageSurface EngineeringSurface TreatmentSurface PolishingSurface ProcessingMicrostructure