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Publication | Open Access

Frame structure for thin-film piezoelectric-on-silicon resonator to greatly enhance quality factor and suppress spurious modes

DOIFull Paper Access

24

Citations

29

References

2018

Year

Feihong Bao, Leilei Bao, Xiaosheng Zhang, Chao Zhang, Xinyi Li, Feng Qin, Ting Zhang, Yi Zhang, Zhaohui Wu, Jingfu Bao
Sensors and Actuators A Physical

References

YearCitations

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