Multi-layer integrated photonics from the ultraviolet to the infrared

Abstract

We demonstrate a scalable multi-layer integrated photonics platform that operates over a multi-octave wavelength range, from the near-ultraviolet (NUV) to the near-infrared (NIR). The platform is CMOS compatible and consists of silicon nitride (Si₃N₄) and alumina (Al₂O₃) optical waveguides cladded with silicon dioxide (SiO₂). We demonstrate low-loss waveguides and passive components including diffractive vertical grating couplers for input/output (I/O). The multilayer nature of the platform enables complex routing of multiple wavelengths, making it useful for a variety of applications including integrated atomic-molecular-optical (AMO) and biophotonic systems.