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Effect of aluminum contents on sputter deposited CrAlN thin films

A. Vyas, Zhifeng Zhou, Y.G. Shen

IOP Conference Series Materials Science and Engineering · 2018 · 19 citations · 30 references

DOIFull text

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Abstract

2017 International Conference on Mechanical Engineering and Applied Composite Materials, MEACM 2017, Hong Kong, 23-24 Nov 2017

References

30

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Phase transition of pseudobinary Cr–Al–N films deposited by magnetron sputtering method

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