Fast analytical model of MZI micro-opto-mechanical pressure sensor

Abstract

This paper presents a fast analytical procedure in order to design a micro-opto-mechanical pressure sensor (MOMPS) taking into account the mechanical nonlinearity and the optical losses. A realistic model of the photonic MZI is proposed, strongly coupled to a nonlinear mechanical model of the membrane. Based on the membrane dimensions, the residual stress, the position of the waveguide, the optical wavelength and the phase variation due to the opto-mechanical coupling, we derive an analytical model which allows us to predict the response of the total system. The effect of the nonlinearity and the losses on the total performance are carefully studied and measurements on fabricated devices are used to validate the model. Finally, a design procedure is proposed in order to realize fast design of this new type of pressure sensor.